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optical properties of polymer-like organic thin films deposited by pla…
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- 등록일 25-05-13
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optical properties of polymer-like organic thin films deposited by plasma-enhanced chemical vapor deposition using toluene as the precursor
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- Effects of N2 plasma treatment of titanium nitride/borophosphosilicate glass patterned substrates on metal organic chemical vapor deposition of copper
- Polymer-like organic thin films deposited by plasma enhanced chemical vapor deposition using the para-xylene precursor as low dielectric constant interlayer dielectrics for multilevel metallization