PUBLICATION
홈
PUBLICATION
PUBLICATION
PUBLICATION
Effects of N2 plasma treatment of titanium nitride/borophosphosilicate…
작성자최고관리자
- 등록일 25-05-13
- 조회277회
- 이름최고관리자
본문
Effects of N2 plasma treatment of titanium nitride/borophosphosilicate glass patterned substrates on metal organic chemical vapor deposition of copper
첨부파일
- 16.pdf (753.2K)
- Effects of plasma power on the properties of low-k polymerlike organic thin films deposited by plasma-enhanced chemical vapor deposition using the toluene precursor
- optical properties of polymer-like organic thin films deposited by plasma-enhanced chemical vapor deposition using toluene as the precursor