PUBLICATION
홈
PUBLICATION
PUBLICATION
PUBLICATION
Characteristics of Plasma Polymerized Low-dielectric Constant SiCOH Fi…
작성자최고관리자
- 등록일 25-05-20
- 조회280회
- 이름최고관리자
본문
Characteristics of Plasma Polymerized Low-dielectric Constant SiCOH Films Deposited with Tetrakis(trimethylsilyloxy)silane and Cyclohexane Precursors
첨부파일
- 134.pdf (667.3K)