PUBLICATION
홈
PUBLICATION
PUBLICATION
PUBLICATION
Effect of Annealing Temperature on Dielectric Constant and Bonding Str…
작성자최고관리자
- 등록일 25-05-20
- 조회19회
- 이름최고관리자
본문
Effect of Annealing Temperature on Dielectric Constant and Bonding Structure of Low-k SiCOH Thin Films Deposited by Plasma Enhanced Chemical Vapor Deposition
첨부파일
- 70.pdf (288.7K)